Industrial Board Members of CORONA

bosch
Dr. Tjalf Pirk

CK
Mickael Renault

FRT
Dr. Thomas Fries

CORONA Logo
A NMP project in FP7 funded by the
European Commission
NMP2-SL-2008-213969
CORONA c/o IVAM
P +49 231 9742 168
F +49 231 9742 150

info@corona-mnt.eu
www.ivam.eu

Imprint

Europaflagge
FP7
ivam IVAM e.V. – Coordinator
Inga Goltermann M.A.
Dortmund, Germany
coventor Coventor Sarl
Dr. Gerold Schröpfer
Villebon-sur-Yvette, France
elmos Elmos Advanced Packaging BV
Ignas van Dommelen
Nijmegen, Netherlands
ite Instytut Technologii Elektronowej
Dr. Tomasz Bieniek
Warsaw, Poland
process Process Relations GmbH
Dr. Jens Popp
Dortmund, Germany
theon Theon Sensors S.A.
Emmanuel Patsios
Athens, Greece
unisiegen
Universität Siegen
Prof. Dr. Rainer Brück
Siegen, Germany
unicambridge University of Cambridge
Dr. Andrew Flewitt
Cambridge, United Kingdom
x-fab X-FAB Semiconductor Foundries AG
Dr. Gisbert Hölzer
Erfurt, Germany
IVAM e.V.
Microtechnology Network

Inga Goltermann M.A.
Phone: +49 231 9742 7090
E-mail: go (at) ivam.eu
www.ivam.eu
Dortmund, Germany

IVAM is an international association of companies and institutes in the fields of microtechnology, nanotechnology and advanced materials. As the communicative bridge between suppliers and users, IVAM brings innovations to market and creates competitive advantages via technology marketing. Furthermore, IVAM offers lobbying services for small and medium-sized enterprises, qualification, various publications and world-wide networking on trade fairs and events.

Coventor Sarl

Dr. Gerold Schröpfer
Phone: +33 1 69 29 84 85
gerold.schropfer (at) coventor.com
www.coventor.com
Villebon-sur-Yvette, France

coventor

Coventor is the leading provider of 3D analysis and design automation software for the development of micro- and nano-scale processes, devices and systems. Coventor’s software products have become an essential tool in the development of MEMS and semiconductor devices and are used by design organizations, foundries and at product companies that integrate MEMS. The CoventorWare family of products includes system-level to physical-level modeling and simulation solutions for different industries.

Instytut Technologii Elektronowej

Dr. Tomasz Bieniek
Phone: +48 22716 5990
E-mail: tbieniek (at) ite.waw.pl
www.ite.waw.pl
Warsaw, Poland

The aim of the Instytut Technologii Elektronowej (ITE) is to support industry by the development and dissemination of new, knowledge-based technologies and designs. The mission is to develop and commercialise technologies in the broad field of microelectronics and microsystems. The Department of Microelectronic Technology is the largest and maintains a fully equipped CMOS facility. The CMOS technology line covers microelectronics, photo-detectors and silicon microsystems, and can be used for R&D, prototyping and pilot production.

Process Relations GmbH

Dr. Jens Popp
Phone: +49 231 9742 5971
E-mail: jens.popp (at) process-relations.com
www.process-relations.com
Dortmund, Germany

Based on the XperiDesk Design & Tracking Software-Suite, Process Relations offers software and consulting services for the high-tech industry. As the first Process Development Execution System (PDES), XperiDesk offers a complete environment for technology-based complex process developments and verification from early concept stages to final experiment.

X-FAB Semiconductor Foundries AG

Dr. Gisbert Hölzer
Phone: +49 361 4276 585
E-mail: gisbert.hoelzer (at) xfab.com
www.xfab.com
Erfurt, Germany

xfab

X-FAB is the world’s leading foundry group for mixed-signal semiconductor applications with manufacturing sites in Germany, the UK, the USA and Malaysia. It has a combined capacity of around 70,000 eight inch equivalent wafer starts per month and offers 1.0 to 0.13 µm mixed-signal, CMOS, BiCMOS and special BCD, SOI and MEMS long lifetime processes for automotive, industrial and medical applications. MEMS are a strategic field of interest, and X-FAB relies on more than ten years of experience.

Elmos Advanced Packaging BV

Ignas van Dommelen
Phone: +31 2437 14497
E-mail: corona (at) elmos.eu
www.elmos.eu
Nijmegen, Netherlands

Theon Sensors S.A.

Emmanuel Patsios
Phone: +30 2106 7286 10
E-mail: patsios (at) theon.com
www.theon.com
Athens, Greece

Theon Sensors’ MEMS business unit specializes in the development of silicon-based modules utilizing micro-electronic technologies. Its prime scope of work is to design, develop and produce flexible and customer-specific MEMS modules via standard industrial processes employed for sophisticated control applications used in the aerospace, medical, consumer goods and other markets.

Universität Siegen

Prof. Dr. Rainer Brück
Phone: +49 271 740 2377
E-mail: rainer.brueck (at) uni-siegen.de
www.uni-siegen.de
Siegen, Germany

University of Cambridge

Dr. Andrew Flewitt
Phone: +44 1223 748332
E-mail: ajf (at) eng.cam.ac.uk
www.eng.cam.ac.uk
Cambridge, United Kingdom

Cambridge University Engineering Department has been carrying out research in MEMS devices for over a decade. It has a state-of-the-art clean facility within the University’s Centre for Advanced Photonics and Electronics with a capability for depositing a range of silicon, carbon and metal-based thin film materials as well as nanostructured materials such as carbon nanotubes, silicon nanowires and zinc oxide nanowires. Device fabrication is enabled by 0.5 µm photolithography and electron beam lithography.

Fries Research & Technology GmbH

Fries Research & Technology GmbH (FRT) offers a comprehensive range of metrological surface measuring systems for the non-destructive investigation of topography, profile, film thickness, roughness, abrasion and many other properties. More than 300 reputable international companies from the automotive, semiconductor, MEMS, optical, photovoltaic and many other industries equip their R&D and production departments with FRT metrology systems.

FRT operates from Bergisch Gladbach, Germany and maintains subsidiaries in China, Switzerland and the United States. Additionally, FRT provides a distribution and service network in the USA, Asia and Europe as well as a branch office in Munich.

Cavendish Kinetics

Cavendish Kinetics is a privately held embedded MEMS company that is changing the way IC designers view MEMS devices. The proprietary NanoMech™ MEMS platform dramatically reduces the cost of incorporating MEMS components into semiconductors by eliminating expensive MEMS packaging. The foundation of the NanoMech™ platform is the creation of sealed cavities between the metal layers in the metal interconnect system of standard IC processes without requiring special materials or equipment. The Nanomech™ MEMS platform does not impact transistor characteristics or any other characteristics of the process.

Bosch

The Bosch Group is a leading global supplier of technology and services. In the areas of automotive and industrial technology, consumer goods, and building technology, some 280,000 associates generated sales of 45.1 billion euros in fiscal 2008.

The Bosch Group comprises Robert Bosch GmbH and its more than 300 subsidiaries and regional companies in over 60 countries. If its sales and service partners are included, then Bosch is represented in roughly 150 countries. This worldwide development, manufacturing, and sales network is the foundation for further growth. Each year, Bosch spends more than 3.5 billion euros, or eight percent of its sales revenue, for research and development, and applies for over 3,000 patents worldwide. With all its products and services, Bosch enhances the quality of life by providing solutions which are both innovative and beneficial.